FIRST AMENDMENT TO LEASE
This First Amendment to Lease dated as of March 21, 2001, PROGRESS ROAD LLC, a Massachusetts
limited liability company with a principal place of business at 10 Waltham Street, Wilmington, Massachusetts
01887, as Landlord ("Landlord"), and PRI AUTOMATION, a Massachusetts corporation with its principal
place of business at 17 Progress Road, Billerica, Massachusetts as tenant ("Tenant").
WHEREAS, Landlord and Tenant entered into that certain lease dated as of October 12, 2000, (the "Lease") of
that certain Building located at 17 Progress Road, Billerica, Massachusetts, as more particularly described in the
Lease (the "Premises"); and
WHEREAS, in connection with the Landlord's construction of the Proposed Building, Tenant has INTER ALIA
requested certain revisions and additions in the Proposed Building and changes to the existing Building which
changes require modification to the Lease as are hereafter set forth.
NOW THEREFORE, for Ten Dollars ($10.00) and other good and valuable consideration, the receipt and
sufficiency of which is hereby acknowledged, the Landlord and the Tenant hereby agree to amend the Lease as
1. Section 1.1. of the Lease is amended by deleting the following words in subsection (a) "57,000 +/- rentable
square feet of space" replacing the same with the following: "58,250 rentable square feet of space which includes
1,250 feet of space in the catwalk to be constructed in the Premises at the same time as the construction of the
Proposed Building as hereinafter defined."
2. Section 1.1 of the Lease is hereby further amended by deleting the following words in subsection (b) "61,543
+/- rentable square feet of space" and replacing the same with the following: "61,948 rentable square feet of
space including 7,948 square feet of space on the mezzanine".
3. Section 1.1 of the Lease is hereby further amended by deleting the words "118,543 rentable square feet of
space" and replacing with "120,198 rentable square