CHANGE OF CONTROL AGREEMENT
AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the
“Company”), and (the “Executive”), dated as of the day of , 200 .
The Board of Directors of the Company (the “Board”) has determined that it is in the best interests of the
Company and its shareholders to assure that the Company will have the continued dedication of the Executive,
notwithstanding the possibility, threat or occurrence of a Change of Control (as defined below) of the Company.
The Board believes it is imperative to diminish the inevitable distraction of the Executive by virtue of the personal
uncertainties and risks created by a pending or threatened Change of Control and to encourage the Executive’s
full attention and dedication to the Company currently and in the event of any threatened or pending Change of
Control, and to provide the Executive with compensation and benefits arrangements upon a Change of Control
which ensure that the compensation and benefits expectations of the Executive will be satisfied and which are
competitive with those of other corporations. Therefore, in order to accomplish these objectives, the Board has
caused the Company to enter into this Agreement.
NOW, THEREFORE, IT IS HEREBY AGREED AS FOLLOWS:
1. Certain Definitions .
1.1. The “Effective Date ” shall mean the first date during the Change of Control Period (as
defined in Section 1.2) on which a Change of Control (as defined in Section 2) occurs. Anything in this
Agreement to the contrary notwithstanding, if a Change of Control occurs and if the Executive’s employment with
the Company is terminated prior to the date on which the Change of Control occurs, and if it is reasonably
demonstrated by the Executive that such termination of employment (i) was at the request of a third party who
has taken steps reasonabl