FOR IMMEDIATE RELEASE
June 15, 2007
EHD Technology Group, Inc.
BlueShift Technology, Inc.
Novel In-Vacuum Wafer Cleaning Concept to be Shown
at Semicon West - Booth #530 South Hall
Duarte, CA……. BlueShift™ Technologies and EHD Technology Group will
demonstrate the concept of surface preparation integrated into vacuum wafer-handling
systems at the upcoming Semicon West show in San Francisco, South Hall booth 530.
With trends toward highly-integrated vacuum processing and increased number of
process steps, the combination of BlueShift’s QuickLink™ vacuum wafer-handling
system and EHD’s in-vacuum cleaning technology promises higher throughput and fewer
Electrostatically generated, uniquely-small EHD nanodroplets of various chemicals and
materials impact wafer surfaces with variable, controllable impact characteristics to
remove particles and residuals. Current development of processing, cleaning, coating,
and drying for semiconductor applications includes:
1. Post-process resist strip and sacrificial layer lift-off following implant, deposition,
2. Post-plating and polishing removal of hydrophobic/hydrophilic residual.
3. Aerosol finishing and drying for removal of trace particles, residuals, and
4. Post-test cleaning and drying of wafers and test fixtures.
EHD Technology Group is emerging from core technology development of electrostatic
aerosolization and entering joint development of alpha tools for surface preparation
process development. Commercial versions of the concept to be shown at Semicon West
will be developed to suit specific OEM or end-user requirements based upon process
development results from alpha tool projects.
About EHD Technology Group
EHD Technology Group, Inc. develops electrohydrodynamic (EHD) emission arrays for
integration into semiconductor OEM equipment