INCENTIVE COMPENSATION PLAN
On June 23, 2010, FSI International, Inc. (the “Company”) adopted a compensation plan for the fiscal year
ending August 28, 2010 (the “Plan”) that provides for an aggregate amount of incentive cash compensation to be
available for distribution to employees of the Company, including its executive officers. The aggregate amount
distributable under the Plan will be based on the Company’s operating income, prior to any incentive plan
accrual, for the fiscal year ending August 28, 2010. Amounts ultimately paid under the Plan to employees,
including executive officers, would be at the discretion of the Compensation Committee of the Board of Directors
(the “Committee”). The Committee’s determination and payment of any amounts under the Plan likely would be
made in November 2010, in connection with the completion of the audited financial statements for the Company.
The maximum amounts that could be paid to any executive officer under the Plan has been set as a percentage of
such officer’s base salary for the 2010 fiscal year. For the Chief Executive Officer that percentage is 100% of
base salary and for each of the other executive officers that percentage is 80% of base salary.