AXCELIS TECHNOLOGIES, INC.
INDEPENDENT CONSULTANT AGREEMENT
This Agreement is entered into effective this 9th day of June, 2003 by and between Axcelis Technologies, Inc., a
Delaware corporation with its principal office at 55 Cherry Hill Drive, Beverly, Massachusetts 01915 ("Axcelis")
and Stephen G. Bassett, with an address at 2 Keystone Way, Andover, Massachusetts ("Consultant").
In consideration of the mutual covenants and promises contained herein, Axcelis and Consultant agree as follows:
1. Performance of Services. Consultant agrees to provide to Axcelis the services generally described in Schedule
1 (the "Services"). Consultant shall supply all necessary supplies and materials and shall be solely responsible for
requesting any information necessary from Axcelis for the performance of the Services. Consultant shall not
employ any subcontractors for any of the Services without the prior written approval of Axcelis, and Consultant
shall remain responsible for the performance of any such subcontractors. Consultant shall perform the Services in
accordance with the professional standards of skill, care, and diligence.
2. Time. Consultant agrees to adhere to the time commitments set forth in Schedule 1 or as otherwise mutually
agreed upon. Consultant shall perform the Services as expeditiously as is consistent with the standards of
professional skill and care required hereby. Consultant shall perform the Services in coordination with the
operations of Axcelis and with any party engaged by Axcelis in connection with the Services being performed.
3.1. Fees. For the Services provided by Consultant under this Agreement, Axcelis agrees to compensate
Consultant according to Schedule 2.
3.2. Reimbursable Expenses. Axcelis shall compensate Consultant for reasonable expenses actually incurred by
Consultant to the extent provided in Schedule 1 ("Reimbursable Expenses"). Consultant agrees that if such
expenses are for travel, Consultant shall either (i) use Axcelis' tra