EXHIBIT 10.50
[ * ] = CERTAIN CONFIDENTIAL INFORMATION CONTAINED IN THIS DOCUMENT,
MARKED BY
BRACKETS WITH ASTERISKS, HAS BEEN OMITTED AND FILED SEPARATELY WITH THE
SECURITIES AND EXCHANGE COMMISSION PURSUANT TO RULE 24B-2 OF THE SECURITIES
EXCHANGE ACT OF 1934, AS AMENDED.
LICENSE AGREEMENT
BETWEEN
INTERNATIONAL BUSINESS MACHINES CORPORATION
AND
IBIS TECHNOLOGY CORPORATION
FIA-2000-0027 1
TABLE OF CONTENTS
FIA-2000-0027 IBM/IBIS CONFIDENTIAL IBIS
Know-How License 12-18-2000 Page 2 of 36
This License Agreement (the "Agreement") is by and between INTERNATIONAL BUSINESS MACHINES
CORPORATION (referred to as "IBM") and IBIS TECHNOLOGY CORPORATION (referred to as "IBIS"),
each referred to as a "Party" or, collectively referred to as the "Parties".
WHEREAS: IBIS has previously developed expertise in products for the implantation and annealing of
semiconductor wafers with oxygen;
WHEREAS: IBM has developed an improved method of implantation and annealing;
SECTION PAGE
1. DEFINITIONS .............................................. 4
2. SCOPE .................................................... 7
3. LICENSES ................................................. 9
4. CONFIDENTIAL INFORMATION ................................. 9
5. COMPENSATION ............................................. 13
6. TERMINATION .............................................. 17
7. REPRESENTATIONS AND DISCLAIMERS .......................... 19
8. TECHNOLOGY TRANSFER & TECHNICAL
ASSISTANCE ............................................... 22
9. APPLICABLE LAW ........................................... 24
10. MISCELLANEOUS ............................................ 26
TABLE OF CONTENTS
FIA-2000-0027 IBM/IBIS C