RESEARCH AGREEMENT (And Amendments)
This Research Agreement ("Agreement") is entered into by and between AMTECH SYSTEMS INC.
("Sponsor") and THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ("University"), a nonprofit
educational institution incorporated under the laws of the State of California.
Witnesseth
WHEREAS, Sponsor possesses an ownership interest in United States Patent No. 5,215,588 entitled "Photo-
CVD System" and issued on June 1, 1993 to Ji H. Rhieu of Mesa, Arizona; and
WHEREAS, Sponsor claims existing rights in intellectual property under continuation-in-part to U.S. Patent No.
5,215,588, Patent Application Serial No. 08/067,286, filed on May 25, 1993 (hereinafter referred to as Method
A); and
WHEREAS, University claims existing rights in intellectual property whose conception occurred before the
period covered by this Agreement, is included in disclosure UC Case No. 93-338-1, and is entitled "Parallel
Purge Configuration for Photo-CVD Process (UCSC B)" (hereinafter referred to as Method
B); and
WHEREAS, University claims existing rights in intellectual property whose conception occurred before the
period covered by this Agreement, is included in disclosure UC Case No. 93-338-1, and is entitled
"Perpendicular Purge Configuration for Photo-CVD Process (UCSC C)" (hereinafter referred to as Method C);
and
WHEREAS, the research project contemplated by this Agreement is of mutual interest and benefit to University
and to Sponsor, will further the instructional, scholarship and research objectives of University in a manner
consistent with its status as a nonprofit, tax-exempt, educational institution, and is intended to further the business
objectives of Sponsor and to provide benefits to Sponsor through the actual reduction to practice of Method A
under this Agreement; and
WHEREAS, in this Agreement the term Improvement Invention shall mean any patentable invention owned by
the University which includes or broadens one or more of the claims in Method A and which is conceived a