FIRST AMENDMENT TO AGREEMENT OF LEASE
AGREEMENT made as of the 22nd day of November, 2000, by and between COMMERCE PARK
REALTY, LLC, a Connecticut limited liability company having an address at 7 Finance Drive, Danbury,
Connecticut 06810 ("LESSOR") and ADVANCED TECHNOLOGY MATERIALS, INC., a Delaware
corporation having an address at 7 Commerce Drive, Danbury, Connecticut 06810 ("LESSEE").
A. Lessee has leased certain land and improvements known as 7 Commerce Drive, Danbury, Connecticut (the
"Leased Premises"), pursuant to a lease dated December 23, 1994 between Melvyn J. Powers and Mary P.
Powers, d/b/a/ M&M Realty, as original lessor, and Lessee, as lessee (the "Lease").
B. Lessor is the successor in interest to Melvyn J. Powers and Mary P. Powers, d/b/a M&M Realty, as lessor
under the Lease.
C. Lessee has requested that Lessor agree to certain modifications of the Lease term and the rent payments due
D. As a condition to granting its consent to Lessee's requests, Lessor requires that the Lease be modified in
accordance with the terms of this Agreement.
E. In consideration of the foregoing, and for One Dollar ($1.00) and other valuable consideration received by
each to their satisfaction, Lessor and Lessee hereby agree as follows:
1. Lessor and Lessee hereby agree that the initial term of the Lease shall end on June 30, 2006. All references in
the Lease and herein to the term "Initial Term" shall be deemed to mean the period commencing on the
Commencement Date (as defined in the Lease) and ending on June 30, 2006.
2. Lessee agrees that the current annual Fixed Rent of Four Hundred Eighty-Five Thousand Seven Hundred Two
and 67/100 Dollars ($485,702.76), which is payable in advance in equal monthly installments of Forty Thousand
Hundred Seventy-Five Dollars and 23/100 ($40, 475.23), shall be payable for the remainder of the Initial Term,
as the Initial Term has been extended hereby.
3. Lessor agrees that the Lessee shall have the opt